On the Zero-Order Diffraction of Phase Mask
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Abstract
The zero-order diffraction of phase grating mask is analysed for rectangular and sinusoidal corrugated profiles, and a novel method is proposed for determining the depth and duty cycle parameter by the diffraction measurement at different wavelengths.
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WEN Peng-yue, CUI Xiao-ming, LIU Hong-du, E. Y. B. Pun, P. S . Chung. On the Zero-Order Diffraction of Phase Mask[J]. Chin. Phys. Lett., 1997, 14(11): 830-833.
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WEN Peng-yue, CUI Xiao-ming, LIU Hong-du, E. Y. B. Pun, P. S . Chung. On the Zero-Order Diffraction of Phase Mask[J]. Chin. Phys. Lett., 1997, 14(11): 830-833.
|
WEN Peng-yue, CUI Xiao-ming, LIU Hong-du, E. Y. B. Pun, P. S . Chung. On the Zero-Order Diffraction of Phase Mask[J]. Chin. Phys. Lett., 1997, 14(11): 830-833.
|
WEN Peng-yue, CUI Xiao-ming, LIU Hong-du, E. Y. B. Pun, P. S . Chung. On the Zero-Order Diffraction of Phase Mask[J]. Chin. Phys. Lett., 1997, 14(11): 830-833.
|
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