Simultaneous Elastic Recoil Detection Analysis of H and Other Elements in Foils

Hydrogen and other elements in Si_xN_yH_z foils have been simultaneously measured by using a single E(gas)-E(PSD) telescope and heavy ¹²⁷I ion beam in elastic recoil detection analysis (ERDA). Hydrogen is measured in the non-coincidence spectrum of E(PSD), and other elements from the Δ E-E coincidence spectrum. The composition and depth profiling of the foils are obtained from the simulated spectra.