Electroluminescence of Boron Doped Diamond Thin Films

Blue electroluminescence of boron doped diamond thin film is reported. The boron doped diamond thin films were deposited by microwave plasma assisted chemical vapor deposition on silicon substrate. The electroluminescence device was driven by a frequency-modulated power supply. The optimum frequency is near 3 kHz. The dependence of electroluminescence intensity on boron impurity has been investigated. The intensity increases with increasing boron impurity. This is expected result according to “Band A ”electroluminescence mechanism of donor-accepter pairs recombination.