Structural Changes in Nitrogen-Doped a C:H Films

The influence of nitrogen on the microstructure of a-C:H film is investigated by infrared, photoluminescence (PL), and transmittance-reflectance spectra. It is indicated that nitrogen incorporation into a-C:H network will weaken some C-H bonds, which is confirmed by differential scanning calorimeter experimental results. It is also demonstrated that nitrogen entering into a-C:H film can raise luminescence intensity. On the other hand, nitrogenation will reduce PL thermal stability.