INFLUENCE OF SUBSTRATE TEMPERATURE ON THE STRUCTURE OF SPUTTERED a-Si_1-xSn_x:H ALLOYS

X-ray diffraction, SEM and XPS were used to detect the structure of sputtered a-Si_1-xSn_x:H alloys. It is verified that the types of Sn site in the alloys depend on substrate temperature T_s. Most of the Sn atoms are substituted for Si at T_s 220°C, whereas a larger fraction of β-Sn clusters are formed at T_s 220°C.