Dynamical Model in Low-Frequency-Pulsed Electron-StimulatedDesorption

A dynamical model of low-frequency-pulsed electron-stimulated desorption is developed. The characteristic of desorbed gas flow is taken as an exponential function, and can be degenerated to a triangular and square wave. The transient pressure is given according to the gas flow of desorbing gas and vacuum system parameters, including the pumping speed and the system volume. Although the mathematical model is deduced from the electron-stimulated desorption, it can be applied to other similar processes of intermittent desorption.