Characteristics of Microwave Discharge in a Modified Surfaguide with a Large Diameter

The characteristics of the microwave discharge are studied in a modified surfaguide with a large diameter. Experimental results show that there exist three discharging modes, one is the plasma mode, and the others are the waveguide modes. The discharge can jump between one of the waveguide modes and the plasma mode, and the corresponding hysteresis loop is influenced by the discharging pressure. In the higher pressure region, the hysteresis loop is wide enough so that the discharge in each mode is stable. In the middle pressure region, the discharge becomes unstable as a result of the hysteresis loop being sufficiently narrow. When the gas pressure is further decreased, the plasma mode disappears, while the mode jumps between the two waveguide modes always appear and are stable in the discharge region we have explored.