Dynamics Behaviour of Nanoscale Electrostatic Actuators

  • Published Date: October 31, 2003
  • The dynamics behaviour for nanoscale electrostatic actuators is studied. A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodical orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.
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