Fractal Pattern Growth in Ti-Implanted Steel with High Ion Flux

We report on the formation of metal nanometer phase and fractal patterns in steel using metal vapor vacuum arc source ion implantation with high ion flux. The dense nanometer phases are cylindrical and well dispersed in the Ti-implanted layer with an ion flux up to 50μA/cm². The collision fractal pattern is formed in Ti-implanted steel with ion flux of 25μA/cm² and the disconnected fractal pattern is observed with ion flux of 50μA/cm². The average density of nanometer phases decreases from 1.2 x 10¹¹/cm² to 6.5 x 10¹⁰/cm² as the ion flux increases from 25μA/cm² to 50μA/cm². Fractal pattern growth is in remarkable agreement with Sander's diffusion-limited aggregation model. The alloy clusters have diffused and aggregated in chains forming branches to grow a beautiful tree during Ti implantation with ion flux raging from 75μA/cm² to 85μA/cm². The model of fractal pattern growth during ion implantation with high ion flux is discussed.