Compact Arrayed-Waveguide Grating on Silicon-on-Insulator with Integrated Waveguide Turning Mirrors

A compact arrayed-waveguide grating (AWG) on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors (WITMs). By properly setting the incident angle with the value of 45°, the effective area of the WITM AWG is only 1.15cm×1.15cm with the arrayed waveguide area of 0.6cm×0.6cm. The crosstalk of the fabricated 1×6 AWG is better than -19dB. The on-chip insertion loss is about -8.8dB and the output nonuniformity is less than 0.6dB. The polarization-dependent central wavelength shift is about 0.048nm and the polarization dependent loss is neglectable.