Structure and Photoluminescence of Nano-ZnO Films Grown on a Si (100) Substrate by Oxygen- and Argon-Plasma-Assisted Thermal Evaporation of Metallic Zn

Nano-ZnO thin films were prepared by oxygen- and argon-plasma-assisted thermal evaporation of metallic Zn at low temperature, followed by low-temperature annealing at 300°C to 500°C in oxygen ambient. X-ray diffraction patterns indicate that the nano-ZnO films have a polycrystalline hexagonal wurtzite structure. Raman scattering spectra demonstrate the existence of interface layers between Zn and ZnO. Upon annealing at 400°C for 1h, the interface mode disappears, and photoluminescence spectra show a very strong ultraviolet emission peak around 381nm. The temperature-dependent PL spectra indicate that the UV band is due to free-exciton emission.