Epitaxial Growth of Bi₂Sr_2-xLa_xCu₁O_6+δ Thin Films by In-Situ dc Magnetron Sputtering

Bi₂Sr_2-xLa_xCu₁O_6+δ (La-2201) thin films were successfully prepared on (100) SrTiO₃ and (100) LaAIO₃ substrates by in-situ dc-magnetron sputtering process. A series compensated 2201 targets of La³⁺ substitution contents for Sr²⁺ were studied for growing 2201 phase thin films. The superconducting zero resistance temperature T_c,0 reached 19K. X-ray diffraction analyses showed that films oriented with c-axis perpendicular to the substrate surface and their lattice parameters are around 2.43-2.46nm. Ф-scan and rocking curve show a good epitaxial growth and crystallisation of the films.