Effect of the Compressive Stress for the Growth of Cubic-BN Film

In this work, it is found that the compressive stress on the surface of cubic-BN (c-BN) film is all smaller than that inside c-BN film and after a longer period, the depositing matter mainly is of hexagonal-BN phase rather than c-BN phase, those just are the reason why a pure thicker c-BN film cannot, as yet, be obtained. Up to now the lowest IR peak position of 1004.7cm^-1 detected from a broken and part delaminated c-BN film may be one close to the stressless c-BN.