SUPERCONDUCTING FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA IONS DEPOSITION

An Y-Ba-Cu-O superconducting film with onset temperature T_c (onset)= 91K and zero resistance temperature T_c (end)=81.4K has been obtained for the first time by wing electron cyclotron resonance (ECR) plasma ions deposition technique. The relationship between the composition of the film and the atmosphere as well as the distance between the target and substrate has also been given.