CALCULATIONS OF NUCLEAR STOPPING POWERS AND RANGES IN THE LOW-ENERGY REGION

  • The interactions between incident particles and solids in ion implantation have been discussed, basing on the generalized Langevin theory. Considering anharmonic effects of interactions among lattice atoms, we calculated numerically the nuclear stopping power and the distribution of projected ranges, which are in agreement with the results of the program TRIM-88 in the low-energy limit.
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