Effects of Chamber Pressure on Current-Voltage Characteristic of Metal-Insulator-Metal Element in Heat-Treating Anodized Ta2O5 Film

Ta/anodized Ta₂O₅/Al is used as metal-insulator-metal (MIM) element in experiments, The current- voltage (I- V) characteristic of the MIM element depends on the chamber pressure in heat-treating anodized Ta₂O₅ film. Good nonlinear I- V characteristic has been obtained in the pressure range from 10^-2 to 10^-4 to Torr. Meanwhile, the conductivity coefficient α of the Poole-frenkel (PF) equation which describes the I- V characteristic can be regulated by about two orders of magnitude in this pressure range, while the non-linearity coefficient β of the PF equation is not affected by the chamber pressure.