DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH 19F IONS
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Abstract
The hydrogen depth profiling in solids has been done by elastic recoil detection (ERD) technique with multicharged 19F ion beam from a small Tandem Accelerator of 2x1.7MV. Details of the experimental technique are described. The depth resolution of about 230Å in the near-surface regions (~5000Å)is much better than that of ERD technique with 2.5MeV He beam and heavy ion beam of 30MeV.
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LIU Jiarui, ZHU Peiran, FENG Aiguo, LI Dawan. DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH 19F IONS[J]. Chin. Phys. Lett., 1987, 4(6): 249-252.
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LIU Jiarui, ZHU Peiran, FENG Aiguo, LI Dawan. DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH 19F IONS[J]. Chin. Phys. Lett., 1987, 4(6): 249-252.
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LIU Jiarui, ZHU Peiran, FENG Aiguo, LI Dawan. DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH 19F IONS[J]. Chin. Phys. Lett., 1987, 4(6): 249-252.
|
LIU Jiarui, ZHU Peiran, FENG Aiguo, LI Dawan. DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH 19F IONS[J]. Chin. Phys. Lett., 1987, 4(6): 249-252.
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