Synthesis of Nano-crystalline Diamond Films

We have deposited nano-crystalline diamond films in a routine hot filament chemical vapor deposition system, using CH₄/H₂ gas mixture. We used various measurements such as field emission scanning electron microscopy, micro-Raman spectroscopy, x-ray photoelectron spectroscopy, and transmission electron microscopy for characterization. The result show that the films consist of a crystalline diamond phase with small grain sizes ranging from 20 to 100nm.