An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20 GHz

We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors (ECPDs). The 10 ECPDs exhibit a uniform 3 dB bandwidth of 20 GHz and low dark current of about 1 nA at 2 V reverse bias. The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23 A/W with an active region of 5×25 μm². The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.