Laser-Induced Damage Threshold of TiO₂ Films with Different Preparation Methods and Annealing Temperatures

Sol-gel TiO₂ films are prepared by the dip-coating method and the spin-coating method, and then annealing is performed at different temperatures. The structures, optical properties, surface morphologies, absorption and laser-induced damage threshold (LIDT) at 1064 nm and 12 ns of the films are investigated. The results show that the dip-coating method can be used to obtain a higher LIDT than the spin-coating method. When the annealing temperature increases from 80°C to 120°C, the dip-coated film obtains a higher LIDT, whereas the spin-coated film obtains a lower LIDT. In addition, the damage morphology is a spalling pit for the dip-coated film annealed at 80°C. When the annealing temperature increases to 120°C, it shows a melting area. For both the spin-coated films annealed at different temperatures, the damage morphologies are the combination of spalling and melting. The differences in LIDT and damage morphologies of the films are discussed.