Fabrication of Nano-Columnar Tungsten Films and Their Deuterium and Helium Ion Irradiation Effects

We fabricate nano-columnar tungsten (W) films on polycrystalline silicon substrates by magnetron sputtering using a grazing angle deposition technique. The deposition process is performed at a base pressure of 5×10^?4 Pa. The intersection angle between the direction of the incident beam and the normal direction of the substrate is set as 85°. Separate as well as synergetic irradiations of 30/50 keV deuterium ions and 60 keV helium ions are carried out for the nano-columnar W. Samples of normal structure W are also irradiated under the same conditions as a comparison. Scanning electron microscopy and x-ray diffraction are used to characterize the structure of the as-prepared as well as the irradiated samples. The experimental results show that blisters are difficult to form on the surface of nano-columnar W under the irradiation conditions in this work, which could be due to the particular structure.