Equivalent Trap Energy Level Extraction for SiGe Using Gate-Induced-Drain-Leakage Current Analysis

The gate-induced-drain-leakage of MOSFETs is analyzed to better understand the sub-threshold swing degradation of SiGe tunnel field-effect transistors and their band-to-band tunneling mechanism. The numerical model of the analysis is elaborated. Equivalent trap energy levels are extracted for Si and strained SiGe. It is found that the equivalent trap energy level in SiGe is shallower than that in Si.