P-type ZnO:N Films Prepared by Thermal Oxidation of Zn₃N₂

We prepare p-type ZnO:N films by annealing Zn₃N₂ films in oxygen over a range of temperatures. The prepared films are characterized by various techniques, such as Rutherford backscattering spectroscopy, x-ray diffraction, x-ray photoemission spectroscopy, the Hall effect and photoluminescence spectra. The results show that the Zn₃N₂ films start to transform to ZnO at 300°C and the N content decreases with an increase in annealing temperature. N has two local chemical states: zinc oxynitride (ZnO_1?xN_x) and substitutional N_O in O-rich local environments (α -N_O). The conduction type changes from n-type to p-type upon oxidation at 400–600°C, indicating that N is an effective acceptor in the ZnO film. The photoluminescence spectra show the UV emission and defect-related emissions of ZnO:N films. The mechanism and efficiency of p-type doping are briefly discussed.