Enhanced Light Output of InGaN-Based Light Emitting Diodes with Roughed p-Type GaN Surface by Using Ni Nanoporous Template

Roughened surfaces of light-emitting diodes (LEDs) provide substantial improvement in light extraction efficiency. By preparing the self-assemble nanoporous Ni template through rapid annealing of a thin Ni film, followed by a low damage dry etching process, a p-side-up LED with a roughened surface has been fabricated. Compared to a conventional LED with plane surface, the light output of LEDs with nanoporous p-GaN surface increases up to 71% and 36% at applied currents of 1 mA and 20 mA, respectively. Meanwhile, the electrical characteristics are not degraded obviously after surface roughening.