Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO₃ Films

Strontium titanate films with high a−axis-orientation a₍₁₀₀₎=94.1% were deposited on (111) Pt/Ti/SiO₂/Si substrates by the metal organic deposition process. X−ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature. It is found that the dielectric properties are improved by a higher annealing temperature, while the leakage currents are also enhanced, and the possible causes of temperature dependence are discussed.