1 Department of Physics, Sichuan University, Chengdu 610064
2 Key Laboratory of Radiation Physics and Technology of the Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064
3 Institue of Modern Physics, Fudan University, Shanghai 200433
4 Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049
Helium-containing titanium films were prepared on Si substrates with various biases applied by magnetron sputtering under stable He/Ar ambiance. Rutherford backscattering and elastic recoil detection analyses are used to measure the thickness of the He-Ti films and the helium depth profile, respectively. Experiments of x-ray diffraction and variable energy positron annihilation spectroscopy are carried out to investigate the microstructures of titanium films and the corresponding helium-related defects developed. The behavior of the implanted He, the microstructure of the He-Ti film and the formation of He-related defects all are affected by the substrate biases applied.
ZHANG Li-Ran, DENG Ai-Hong, YANG Dong-Xu, ZHOU Yu-Lu, HOU Qing, SHI Li-Qun, ZHONG Yu-Rong, WANG Bao-Yi. Bias Effects on the Growth of Helium-Containing Titanium Films[J]. Chin. Phys. Lett., 2011, 28(7): 077802. DOI: 10.1088/0256-307X/28/7/077802
ZHANG Li-Ran, DENG Ai-Hong, YANG Dong-Xu, ZHOU Yu-Lu, HOU Qing, SHI Li-Qun, ZHONG Yu-Rong, WANG Bao-Yi. Bias Effects on the Growth of Helium-Containing Titanium Films[J]. Chin. Phys. Lett., 2011, 28(7): 077802. DOI: 10.1088/0256-307X/28/7/077802
ZHANG Li-Ran, DENG Ai-Hong, YANG Dong-Xu, ZHOU Yu-Lu, HOU Qing, SHI Li-Qun, ZHONG Yu-Rong, WANG Bao-Yi. Bias Effects on the Growth of Helium-Containing Titanium Films[J]. Chin. Phys. Lett., 2011, 28(7): 077802. DOI: 10.1088/0256-307X/28/7/077802
ZHANG Li-Ran, DENG Ai-Hong, YANG Dong-Xu, ZHOU Yu-Lu, HOU Qing, SHI Li-Qun, ZHONG Yu-Rong, WANG Bao-Yi. Bias Effects on the Growth of Helium-Containing Titanium Films[J]. Chin. Phys. Lett., 2011, 28(7): 077802. DOI: 10.1088/0256-307X/28/7/077802