Measurement of Random Surface Parameters by Angle-Resolved In-plane Light Scattering with Constant Perpendicular Wave Vector

We report the experimental method of angle-resolved in-plane light scattering for random surface parameter extraction. In the measurement of the scattered intensity profile at a certain angle of incidence, the perpendicular component of wave vector remains constant, which is realized by controlling the movement of the detector along a specified circular arc segment. We use the central δ−peak and the half-width of the diffused intensity profiles and their variations to obtain the roughness w, the lateral correlation length ξ and roughness exponent α of the rough surface sample. The measurement copes strictly with the theoretical analysis, and the inherent problem in previous in-plane light scattering experiment is overcome so that the changes of the perpendicular component of wave vector affect the half width a diffused intensity profile and the measurement accuracy.