Laser Resistance of Ta₂O₅/SiO₂ and ZrO₂/SiO₂ Optical Coatings under 2μm Femtosecond Pulsed Irradiation

Ta₂O₅/SiO₂ and ZrO₂/SiO₂ high reflecting (HR) coatings are prepared by ion beam sputtering and electron beam evaporation, respectively. The laser-induced damage thresholds (LIDTs) of these samples are investigated with 2 μm femtosecond pulse lasers (80 fs, 1 kHz). It is found that the Ta₂O₅/SiO₂ HR coating has a higher capability of laser damage resistance than the ZrO₂/SiO₂ HR coating in the 2 μm femtosecond regime. The scanning electron microscope results show that the damage sites of the ZrO₂/SiO₂ HR coating have a relatively porous structure, the loose structure of coatings will provide more sites for water molecules, and the LIDTs of HR coatings will be reduced as a result of the strong water absorption at the wavelength of 2 μm.