Tunable Anisotropic Absorption of Ag-Embedded SiO₂ Thin Films by Oblique Angle Deposition

Ag-embedded SiO₂ thin films are prepared by oblique angle deposition. Through field emission scanning electron microscopy (SEM), an orientated slanted columnar structure is observed. Energy-dispersive x-ray (EDX) analysis shows the Ag concentration is about 3% in the anisotropic SiO₂ matrix. Anisotropic surface plasma resonance (SPR) absorption is observed in the Ag-embedded SiO₂ thin films, which is dependent on polarization state and incidence angle of two orthogonal polarized lights and the deposition angle. This means that optical properties and anisotropic SPR absorption can be tunable in Ag-embedded SiO₂ thin films. Broadband polarization splitting is also observed and the transmission ratio T_p/T_s between p-and s-polarized lights is up to 2.7 for thin films deposited at α=70°, which means that Ag-embedded SiO₂ thin films are a promising candidate for thin film polarizers.