Measurements of Film Thickness and Growth Temperature of YBa₂Cu₃O_7-δ Films by Pyrometric Absorption Method

A pyrometric absorption method suitable for strongly absorbing films has been developed to monitor the YBa₂Cu₃O_7-δ film growth. This method makes use of the temperature difference between the heater and the substrate. By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured, it is possible to monitor the film thickness and the film surface temperature during deposition. Experimental results show that this is a simple and practicable method.