Pulsed Ion-Sheath Dynamics in a Cylindrical Bore for Inner Surface Grid-Enhanced Plasma Source Ion Implantation

Based on our recently proposed grid-enhanced plasma source
ion implantation (GEPSII) technique for inner surface modification of materials with cylindrical geometry, we present the corresponding theoretical studies of the temporal evolution of the plasma ion sheath between the grid electrode and the target in a cylindrical bore. Typical results such as the ion sheath evolution, time-dependent ion density and time-integrated ion energy distribution at the target are calculated
by solving Poisson's equation coupled with fluid equations for
collisionless ions and Boltzmann assumption for electrons using finite difference methods. The calculated results can further verify the feasibility and superiority of this new technique.