Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film

¹School of Materials Science and Chemistry, Harbin Engineering University, Harbin 150001 ²School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081 ³Key Laboratory of Integrated Circuit, Heilongjiang University, Harbin 150080 ⁴School of Information Engineering, Central University for Nationalities, Beijing 100081

Received Date: August 09, 2008

Published Date: October 31, 2008

Abstract

Pb(Zr_0.53,Ti_0.47)O₃(PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d₃₃ and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.

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