STUDY OF Ba-Y-Cu-O THIN FILMS WITH ZERO RESISTANCE AT LN₂ REGION PREPARED BY MAGNETRON SPUTTERING

We briefly describe our results to date on the magnetron sputtering deposition of Ba_xY_1+xCuO_3-y thin films with T_c onset=96K and T_R=0=83K. We emphasize the importance of the characteristics of the substrate material. The perovskite-SrTiO₃ substrate ddposits high T_R=0 and J_c films. X-ray diffraction studies show that they are of single phase orthorhombic perovskite structure.