EFFECT OF H+-IONS IMPLANTATION AND Ar⁺-IONS BOMBARDMENT ON THE PROPERTIES OF LiNbO₃ CRYSTAL SURFACES

The H+-ions implantation and Ar⁺-ions bombardment did not cause near-surface decomposition of LiNbO₃, but it resulted in the alteration of the physical properties. The XPS (x-ray photoelectron energy spectroscopy) measurement was used to characterize the properties of the radiation damaged surface layer of LiNbO₃.