Effects of Hydrogen Ion Bombardment on Carbon TerminatedSi (111) Surface Studied by LEED and AES
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Abstract
Etching effects of hydrogen ions on the Si(111)-(1x1)C surface have been studied by LEED (low-energy electron diffraction) and AES (Auger electron spectroscopy). It has been found that hydrogen ions, can break the carbon-silicon covalent bonds and cause a phase transition of Si(111)-(1x1)C to the reconstructed Si(111)-(7x7) structure. -