Probe Contamination Effect in Silane Plasma and its Improvement

Department of RadieElectronics, Peking University, Beijing 100871^*Beijing Union University, College of Electronics Engineering, Beijing 100083

Published Date: January 31, 1993

Abstract

The contamination behavior of Langmuir probe in silane glow discharge plasma are discussed. A hot electrical probe is suggested to improve the diagnostics of SiH₄ plasma. Results show the safe duration for reliable measurements of electron temperature can be as long as 40min by this method.