Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on a Substrate Surface

Based on corrected rate equations, the kinetics is revealed for initial growth of thin films with low nucleus density and linear lateral growth rate on a substrate surface. In this case, the mobility and coalescence terms in rate equations are neglected, and the coverage term takes a dominant role. All the calculated results are in agreement with experimental data. These results introduce a new scaling in the case of dominant coverage, which is different from the those in the case of coalescence or mobility in a dominant role.