Au/Ti/p-Diamond Ohmic Contacts Prepared by Radio-Frequency Sputtering
-
Abstract
The as-deposited Au/Ti/p-diamond contacts prepared by rf sputtering are ohmic. The ohmic characteristics of the contacts are improved after annealing. As for the as-deposited and annealed contacts, the specific contact resistivities of 2.886 x 10-3 and 2.040 x 10-4 Ω.cm2 are obtained, respectively. The x-ray photoelectron spectroscopy analysis indicates that the titanium carbide formation occurs at the interface between titanium and the diamond substrate in the as-deposited state, and no TiO2 is observed.
Article Text
-
-
-
About This Article