Modification of TiN Coatings by N⁺ and C⁺ Implantation with High Ion Flux

The TiN coating changed from columnar structure to compact texture after N⁺ and C⁺ implantation. X-ray analysis showed that combining with N atoms, Ti and Ti₂N would be transformed into TiN Phases during N implantation. The ternary solid solution mixtures TiCN have been formed, while Ti, Ti₂N would be transformed into TiC and TiCN phases combining with C atoms after C implantation. The hardness of the TiN coating increased by 2.3-2.4 times after N⁺ or C⁺ implantation. The wear resistance of implanted TiN coatings is 2-3 times higher than that of unimplanted TiN coatings. When the drills were treated with the method, their lifetime would increase by 7 times comparing with unimplanted ones. As an attractive procedure, the ion implantation of the TiN coatings would find new applications in many fields.