Room-Temperature Ferromagnetic ZnMnO Thin Films Synthesized by Plasma Enhanced Chemical Vapour Deposition Method

Room-temperature ferromagnetic Mn-doped ZnO films are grown on Si (001)
substrates by plasma enhanced chemical vapour deposition (PECVD). X-ray
diffraction measurements reveal that the Zn_1-xMn_xO films have the single-phase wurtzite structure. X-ray photoelectron spectroscopy indicates the existence of Mn²⁺ ions in Mn-doped ZnO films. Furthermore, the decreasing additional Raman peak with increasing Mn-doping is considered to relate to the substitution of Mn ions for the Zn ions in ZnO lattice. Superconducting quantum interference device (SQUID) measurements demonstrate that Mn-doped ZnO films have ferromagnetic behaviour at room temperature.