PHOTOACOUSTIC MEASUREMENT OF AMORPHOUS SEMICONDUCTOR SUPERLATTICE FILMS
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Abstract
We present here the first measurement of photoacoustic spectra (PAS) of a-Si:H/a-SiNx:H multilayers. By converting the PAS signal to absorption coefficient, the blue shift and the broadening of Urbach edge are explained as the results of quantum size effect in superlattice structure.
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