Double-Crystal x-Ray Diffraction Study on Ta/Al Multilayers

Double-crystal x-ray diffraction has been used to measure the rocking curve of Ta/Al multilayers. The diffraction profiles of the multilayers are different. Besides the normal profile, two kinds of distorted profiles have been found. The simulations show that the deformed profiles of the peaks are caused by the imperfect periodicity (e.g. systematic period deviation and coexistence of two slightly different periods) in the multilayers.