Transmission Electron Microscopy Investigations of Misfit Dislocation Interactions in GaAs/lnGaAs Superlattices on GaAs (001) Substrates

The complex configurations and interactions of misfit dislocations in strained GaAs/InGaAs superlattices on GaAs (001) substrates have been studied by transmission electron microscopy under the two-beam or weak beam conditions. The observed interactions between a pair of 60°misfit dislocations and an orthogonal 60°misfit dislocation are theoretically explained.