Simultaneous Elastic Recoil Detection Analysis of H and Other Elements in Foils
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Abstract
Hydrogen and other elements in SixNyHz foils have been simultaneously measured by using a single E(gas)-E(PSD) telescope and heavy 127I ion beam in elastic recoil detection analysis (ERDA). Hydrogen is measured in the non-coincidence spectrum of E(PSD), and other elements from the Δ E-E coincidence spectrum. The composition and depth profiling of the foils are obtained from the simulated spectra.
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