EELS INVESTIGATION ON RS a-SixC1-x: H ALLOY FILM
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Abstract
EELS Technique is used to analyze the amorphous silicon-carbon-hydrogen alloy film deposited by RF sputtering method (RS a-SixC1-x: H). It is further verified that a structural change occurs at 1-x ≥ 0.40 in the alloy film.
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ZHANG Fang-qing, XU Xi-xiang, HE De-yan, CHEN Guang-hua. EELS INVESTIGATION ON RS a-SixC1-x: H ALLOY FILM[J]. Chin. Phys. Lett., 1985, 2(6): 241-244.
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ZHANG Fang-qing, XU Xi-xiang, HE De-yan, CHEN Guang-hua. EELS INVESTIGATION ON RS a-SixC1-x: H ALLOY FILM[J]. Chin. Phys. Lett., 1985, 2(6): 241-244.
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ZHANG Fang-qing, XU Xi-xiang, HE De-yan, CHEN Guang-hua. EELS INVESTIGATION ON RS a-SixC1-x: H ALLOY FILM[J]. Chin. Phys. Lett., 1985, 2(6): 241-244.
|
ZHANG Fang-qing, XU Xi-xiang, HE De-yan, CHEN Guang-hua. EELS INVESTIGATION ON RS a-SixC1-x: H ALLOY FILM[J]. Chin. Phys. Lett., 1985, 2(6): 241-244.
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