THE VARIATION OF IN ISLANDS ON InP SURFACE VERSUS ION SPUTTERING ANGLE OBSERVED BY THE ELECTRON ENERGY LOSS SPECTROSCOPY
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Abstract
The idea of using grazing angle ion sputtering to minimize the-formation of In islands on InP(111) surface has been presented and its correctness has been proved by the measurement of electron energy loss spectroscopy.
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HOU Xiao-yuan, YU Ming-ren, WANG Xun. THE VARIATION OF IN ISLANDS ON InP SURFACE VERSUS ION SPUTTERING ANGLE OBSERVED BY THE ELECTRON ENERGY LOSS SPECTROSCOPY[J]. Chin. Phys. Lett., 1985, 2(1): 31-34.
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HOU Xiao-yuan, YU Ming-ren, WANG Xun. THE VARIATION OF IN ISLANDS ON InP SURFACE VERSUS ION SPUTTERING ANGLE OBSERVED BY THE ELECTRON ENERGY LOSS SPECTROSCOPY[J]. Chin. Phys. Lett., 1985, 2(1): 31-34.
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HOU Xiao-yuan, YU Ming-ren, WANG Xun. THE VARIATION OF IN ISLANDS ON InP SURFACE VERSUS ION SPUTTERING ANGLE OBSERVED BY THE ELECTRON ENERGY LOSS SPECTROSCOPY[J]. Chin. Phys. Lett., 1985, 2(1): 31-34.
|
HOU Xiao-yuan, YU Ming-ren, WANG Xun. THE VARIATION OF IN ISLANDS ON InP SURFACE VERSUS ION SPUTTERING ANGLE OBSERVED BY THE ELECTRON ENERGY LOSS SPECTROSCOPY[J]. Chin. Phys. Lett., 1985, 2(1): 31-34.
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