Two Crystal Phases of C3N4 Found in Carbon Nitride Films Prepared by Ion Implantation
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Abstract
CNx films prepared by high dose ion implantation and post-annealing were studied by Auger electron spectroscopy, x-ray photoelectron spectroscopy and x-ray diffraction. A nearly uniform CNx layer was formed. Carbon and nitrogen were found covalently bonded in the films. X-ray diffraction results showed that two crystal phases of C3N4, β-C3N4 and p-C3N4, have been formed in the matrix of carbon.
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