In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique
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Abstract
An advanced ac calorimetric method to measure thermal diffusivity of a thin sample is developed by using an optical reflectivity technique. A modulated infrared laser is used to heat the front surface of a foil specimen. The reflectivity of a continuous-wave He-Ne laser at the rear surface of the specimen is detected by a photoreceiver. According to the temperature dependence of reflectivity, the ac temperature response is obtained. Thermal diffusivity is deduced from a one-dimensional heat conduction equation. A stainless-steel foil and a copper foil are chosen as the samples. The present results agree well with the data in the literature.
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