Dependence of Secondary Ion Mass Spectrometry Relative Sensitivity Factor on Matrix

In secondary ion mass spectrometry, we define the slope of logarithm of relative sensitivity factor versus ionization potential as matrix effect factor. It was found that the matrix effect factor is dependent on the average atomic number and average electronegative values, as well as average oxide formation heat of matrix. The "combined local thermal equilibrium model and bond-breaking'' model proposed by us early was used to explain this dependence.