Cathodoluminescence of ZnO Films

The cathodoluminescence of ZnO films deposited on Si substrates by reactive dc sputtering is investigated. Apart from the characteristic green emission band (522nm) of ZnO, an ultraviolet (392nm) band and a blue (430-460 nm) band have been observed. The x-ray diffraction and cathodoluminescent spectra reveal the dependences of the luminescence on the preparation conditions and crystallinity of the ZnO films.